MF series thermal oxygen flow meters adopt MEMS/platinum sensor, calibrated specially for oxygen gas. Compact stainless body supports micro to medium oxygen flow, with 4-20mA & RS485 outputs for semiconductor and medical oxygen pipeline monitoring.
Special calibration formula for pure oxygen, accurate mass flow calculation
MEMS/platinum dual sensor options, fast response within 50ms
High measurement precision, excellent zero-point stability & repeatability
Wide flow range from tiny SCCM to large Nm³/h, multiple calibers DN8-DN40
Dual signal output: 4-20mA analog + RS485 Modbus communication
Rotatable LCD display shows instant & cumulative flow
| Product Model | MF30-Thermal Gas Mass Flow Meters | ||
| Working Power Supply | DC24V/2.5W | Accuracy (%) | ±(2.0+0.2FS) |
| Medium Temperature | -10~55℃ | Humidity | <95%RH (no frost, no icing) |
| Working Pressure | ≤1.0MPa (pressure can be customized) | Display | Instantaneous flow, cumulative flow |
| Output Mode | 4-20mA/ RS485 optional | Communication Protocol | Modbus Rtu (RS485 output) |
| Mechanical Connection | G3/4 male thread, G1/2 male thread, G3/4 male thread | Response Time | 50-1000 ms |
| Minimum Measurable Flow | 2.8NL/min | Maximum Measurable Flow | 1000NL/min |
| Product Model | MF50-Thermal Gas Mass Flow Meters | ||
| Operating Power Supply | DC24V/2.5W | Accuracy (%) | ±(1.5FS) |
| Medium Temperature | -10~55℃ | Humidity | <95%RH (no frost, no icing) |
| Communication Method | RS485(Modbus Rtu Protocol) | Display | Instantaneous flow rate, cumulative flow rate |
| Output Method | 4-20mA | Response Time | 50-1000 ms |
| Mechanical Connection | BSPT female thread and G female thread are optional, see mechanical interface connection dimensions for details | Working Pressure | ≤1.0MPa (pressure can be customized), integrated type with pressure measurement display can be customized |
| Product Model | MF51-Thermal Gas Mass Flow Meters | |||
| Measuring Medium | Various gases (excluding acetylene) | Power Supply | DC24V / 25W | |
| Pipe Diameter Range | DN20 ~ DN50 | Response Speed | 1S | |
| Flow Velocity Range | 1-100 Nm/s | Output Signal | 4-20mA, RS485, Modbus RTU protocol | |
| Accuracy | ±1 ~ 2.5% | Pipe Material | Anodized aluminum, stainless steel | |
| Working Temperature | Sensor: -40-+250℃; Converter: -20-+55℃ | On-site Display | Four-line Chinese liquid crystal display | |
| Working Pressure | Medium pressure ≤ 3.0MPa | Protection Grade | IP40 | |
| Display Content | Standard volume flow, cumulative flow, standard flow velocity, etc. | |||
| Flow Range | 0.6-60 Nm³/h | 1-100 Nm³/h | 1.6-160 Nm³/h | 2.4-240 Nm³/h |
| Nominal Diameter | DN20 | DN25 | DN32 | DN40 |
| Mechanical Interface | G3/4 female thread | G1 female thread | G1-1/4 female thread | G1-1/2 female thread |
| Product Model | MF52-Thermal Gas Mass Flow Meters | ||
| Working Power Supply | DC24V/2.5W | Accuracy (%) | ±(1.0FS)% |
| Medium Temperature | -10~55℃ | Humidity | <95%RH (no frost, no icing, no condensation) |
| Working Pressure | ≤1.5MPa (3MPa can be customized) | Display | Instantaneous flow, cumulative flow |
| Output Mode | 4-20mA or 1~5V, 0-5V / 0-10V is optional | Mechanical Connection | PT1/2 or G1/4 female thread, other thread interfaces can be customized |
| Communication Method | RS485 (Modbus Rtu protocol) | Response Time | 50 ms |
| Range Ratio | 1:100 | Warm-up Time | 3-4 minutes (better to use after warm-up) |
| Optional Standard Temperature Conditions | 0℃, 20℃, 25℃, user adjustable, default 25℃ | Optional Gas Types | Air, N2, O2, CH4, Ar, CO2, He, H2, C3H8 (other gases can be customized) |
| Protection Class | IP40 | Other Signal Output | PNP output is optional |
| Pipe Diameter | DN8, DN15 optional | ||
| Product Model | MF60-Thermal Gas Mass Flow Meters |
| Working Power Supply | DC24V/12W |
| Accuracy (%) | Control accuracy: ±1.0% SP, Measurement accuracy: 1%fs |
| Control and Measurement Turndown Ratio | 1:100 |
| Valve Type | Normally Closed Type |
| Operating Temperature | -10~55℃ |
| Humidity | <95%RH (no frost, no icing, no condensation) |
| Flow Specification | (0~10, 20, 30, 50, 100, 200, 300, 500) SCCM (0~1, 2, 3, 5, 10, 20, 30) SLM (0~50, 100) SLM (0~200, 300) SLM |
| Operating Pressure Range | Measurement: 0-1.5MPa Control: 10SCCM-30SPLM Pressure: 0.1-1.0MPa 100SPLM Pressure: 0.1-0.65MPa 300SPLM Pressure: 0.1-0.5MPa |
| Typical Control Response Time | Less than 1.5S (T90) |
| Measurement Response Time | <50mS |
| Output Mode | 4-20mA (1-5V), customizable 0-5V, 0-10V |
| Communication Method | RS485 (Modbus Rtu protocol) |
| Control Method | Key operation, Modbus, 4-20mA (1-5V), customizable 0-5V, 0-10V |
| Mechanical Connection | G1/4, PT1/2 female thread, other threads can be customized |
| Protection Class | IP40 |
| Product Model | MF61-Thermal Gas Mass Flow Meters | ||
| Power Supply | DC24V / 3W | Humidity | <95%RH (No frosting, no icing) |
| Turndown Ratio | 1:20 | Working Pressure | Measurement: 0-1.5MPa; Control: 0-1.0MPa |
| Valve Type | Normally Closed | Control Response Time | < 20S (T90) |
| Working Temperature | -10~55℃ | Measurement Response Time | <200ms |
| Output Mode | 4-20mA | Output Mode | 4-20mA |
| Communication Method | RS485 (Modbus Rtu Protocol) | Communication Method | RS485 (Modbus Rtu Protocol) |
| Protection Class | IP40 | Working Pressure Difference | 0~1MPa |
| Control Method | Key Operation; Modbus; 4-20mA | Nominal Diameter | DN15, DN20, DN25, DN32 |
| Mechanical Connection | PT1/2 PT3/4 PT1 PT1-1/4 PT1-1/2 Other interfaces are not supported for the time being | ||
| Accuracy (%) | Control Accuracy: ±1.5% SP; Measurement Accuracy: 1.5fs% | ||
| Standard Condition | Default 25°C, 0°C or 20°C standard temperature can be customized | ||
| Measurable Gases | Air, N2, O2, CH4, Ar, CO2, He, H2, C3H8. For flow controllers other than hydrogen and helium types, do not use them to measure hydrogen or helium by yourself. | ||
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